JPS6173669U - - Google Patents
Info
- Publication number
- JPS6173669U JPS6173669U JP15558184U JP15558184U JPS6173669U JP S6173669 U JPS6173669 U JP S6173669U JP 15558184 U JP15558184 U JP 15558184U JP 15558184 U JP15558184 U JP 15558184U JP S6173669 U JPS6173669 U JP S6173669U
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- pulling
- growing
- keeping
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000011810 insulating material Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 238000010792 warming Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15558184U JPS6173669U (en]) | 1984-10-15 | 1984-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15558184U JPS6173669U (en]) | 1984-10-15 | 1984-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6173669U true JPS6173669U (en]) | 1986-05-19 |
Family
ID=30713599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15558184U Pending JPS6173669U (en]) | 1984-10-15 | 1984-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6173669U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5930795A (ja) * | 1982-08-10 | 1984-02-18 | Sumitomo Electric Ind Ltd | 単結晶引上装置 |
-
1984
- 1984-10-15 JP JP15558184U patent/JPS6173669U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5930795A (ja) * | 1982-08-10 | 1984-02-18 | Sumitomo Electric Ind Ltd | 単結晶引上装置 |
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